Prof. Dr. –Ing Hui-He QIU (LSTM Erlangen-Nuremberg, Germany)

Department of Mechanical Engineering

The Hong Kong University of Science & Technology

Clear Water Bay, Kowloon, Hong Kong

Email address: meqiu@ust.hk

Phone: (852) 2358 7190

Fax: (852) 2358 1543

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Research Area (研究领域):

1. Integrating Micromachined Fast Response Temperature Sensor Array In A Glass Microchannel

Figure 1: Glass-to-glass anodic bonding setup

Figure 2: Process flow of a microchannel integrated with temperature sensors

Figure 3: Microscopic picture of sensors array pattern

Figure 4: 3D sketch of bonded pair

Figure 5: Overview photo of a bonded sample

Figure 6: R-T curve of sensor

Figure 7: Response time of temperature sensor